Chemically amplified resist convertible into inorganic silicate glass (GPR)
Sakata, M; Kosuge, M; Jinbo, H; Ito, T
| HERO ID | 4854561 |
|---|---|
| Year | 1995 |
| Title | Chemically amplified resist convertible into inorganic silicate glass (GPR) |
| Book Title | PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE) |
| Authors | Sakata, M; Kosuge, M; Jinbo, H; Ito, T |
| Volume | 2438 |
| Page Numbers | 775-786 |
| Doi | 10.1117/12.210370 |
| Wosid | WOS:A1995BD35G00069 |
| Is Certified Translation | No |
| Dupe Override | No |
| Comments | Journal:ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XII |
| Is Public | Yes |
| Keyword | SIO2 SOG; SILICATE GLASS; RESIST; CHEMICAL AMPLIFICATION; GLASS PRECURSOR; POLY(ALKOXY)SILOXANE; SILANOL; T-BUTOXYL GROUPS; METAL FABRICATION |