Emission Scenario Document on Photoresist Use in Semiconductor Manufacturing
HERO ID
3840005
Reference Type
Technical Report
Year
2010
Language
English
| HERO ID | 3840005 |
|---|---|
| Year | 2010 |
| Title | Emission Scenario Document on Photoresist Use in Semiconductor Manufacturing |
| Book Title | Series on Emission Scenario Documents No. 9 |
| Authoring Organization | Organisation for Economic Co-operation and Development |
| Publisher Text | OECD Environmental Health and Safety Publications |
| City | Paris |
| Doi | 10.1787/9789264221161-en |
| Url | http://www.oecd.org/officialdocuments/publicdisplaydocumentpdf/?cote=env/jm/mono(2004)14/rev1&doclanguage=en |
| Is Certified Translation | No |
| Dupe Override | No |
| Comments | Journal: ISSN: |
| Is Public | Yes |
| Language Text | English |